Richard A. Allen is a physicist at NIST focusing on 3D packaging technologies for semiconductors, MEMS, and optics. He leads the NIST vibration calibration service and has developed numerous standards for 3D stacking and MEMS integration. Allen has over 30 years of experience in semiconductor and MEMS metrology, including work at JPL and NASA. He has received multiple awards for his contributions to standards and metrology, and serves on several professional committees and boards.
Source: https://www.nist.gov/people/richard-allen
Keywords: Standardization, MEMS, Dimensional Metrology
