The National Institute of Standards and Technology (NIST) has released a comprehensive database of thermophysical properties for argon gas, an essential component in semiconductor manufacturing. The database includes key properties such as molar weight, boiling point, critical pressure, and temperature, along with detailed measurements of specific heat capacity, vapor pressure, and viscosity across a range of temperatures.
The data is presented in a clear, standardized format with temperature ranges from 100 K to 150 K, providing critical information for engineers and researchers working with argon in semiconductor processes. The database includes estimated values marked with #, and notes on data discrepancies marked with * and +.
This resource will be valuable for optimizing semiconductor manufacturing processes, as argon is widely used in semiconductor fabrication for etching, deposition, and doping. The detailed measurements will help engineers better understand and control argon’s behavior in these critical processes, potentially leading to improved semiconductor device performance and yield.
Keywords: quantum algorithms, quantum sensing, quantum metrology
