Index of Semiconductor Process Gases – Ethylene Oxide | NIST

This article presents a comprehensive table of thermophysical properties for ethylene oxide, a key semiconductor manufacturing gas. The table includes:
– Molecular weight and critical properties
– Temperature-dependent properties like specific heat capacity, vapor pressure, and thermal conductivity
– Viscosity and thermal conductivity values

The data is sourced from various references, with some values estimated. The table aims to provide accurate and reliable property data for ethylene oxide, which is essential for optimizing semiconductor manufacturing processes and equipment design.

Source: https://www.nist.gov/pml/sensor-science/fluid-metrology/database-thermophysical-properties-gases-used-semiconductor-8

Keywords: functions, if else, loops

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