This article describes a new optomechanical system for measuring extremely low pressures, ranging from 10⁻⁶ Pa to 10⁻² Pa. The system uses an ultra-thin membrane that vibrates when excited by a drive force. A laser beam shines on the membrane, and changes in the laser’s properties caused by the membrane’s vibrations are measured using an optical phase detector. These measurements help determine the pressure based on how the membrane vibrates and how quickly it stops vibrating (ring-down time).
The system can function as a primary pressure sensor because it measures the membrane’s thickness and density independently, allowing for highly accurate pressure readings. This method offers a new way to measure very low pressures with high precision, which could be useful in scientific research and advanced engineering applications.
Keywords: pressure sensor, ultra-thin membrane, optical phase detector
