This article describes a process for manufacturing alkali metal vapor cells, which are used in various scientific and technological applications, including quantum technologies. The process begins with two wafers: a preform wafer with cavities and a sealing wafer with cover layers and apertures. An alkali metal precursor is placed on the sealing wafer, and when exposed to a reaction stimulus, it turns into vapor. This vapor is then directed through the apertures into the cavities of the preform wafer, where it condenses. The sealing wafer is then moved to cover and seal the condensate inside the cavities, and finally bonded to the preform wafer to create sealed vapor cells.
The method ensures precise control over the placement and sealing of alkali metal inside each cell, which is important for maintaining consistent performance in devices that rely on these cells, such as atomic clocks or quantum sensors. This process highlights advancements in fabrication techniques that support the development of reliable components for quantum and precision measurement technologies.
Source: https://www.nist.gov/patents/process-making-alkali-metal-vapor-cells
Keywords: alkali metal vapor cells, sealing wafer, preform wafer
