Title: NIST Develops Advanced Method for Creating Superconducting Multi-layer Transition-edge Sensors
Summary:
The National Institute of Standards and Technology (NIST) has developed a new hybrid subtractive-additive production method for creating superconducting multi-layer transition-edge sensors (TES). This innovative process involves several key steps:
1. Forming a superconductor layer on a substrate
2. Applying a patterning photoresist on the superconductor layer
3. Creating a sensor pattern in the patterning photoresist
4. Subtractively forming the superconductor sensor layer by removing the patterning photoresist
5. Applying a template photoresist on the superconductor sensor layer
6. Forming an inverse normal metal layer pattern in the template photoresist
7. Exposing a bilayer portion of the superconductor sensor layer for the addition of a normal metal layer
8. Additively forming the normal metal layer on the superconductor sensor layer, with the sensor pattern interposed between the normal metal layer and the substrate
This hybrid approach allows for the precise and accurate creation of superconducting multi-layer TES devices, which have applications in various quantum technologies, including quantum computing and sensing. The implementation of this method could lead to improved performance and reliability of quantum devices, with potential timeframes for adoption depending on further research and development.
Keywords: superconducting, layer, transition-edge, sensor, metal
