A new electron reflectometer has been developed that allows for precise measurement of nanoscale dimensions in three dimensions at a surface using small-angle electron reflection. The device, which includes a sample stage, source, collimator, and detector, overcomes limitations of existing methods like RHEED and RSAES by measuring nanoscale dimensions directly from intensity information of reflected electrons.
The electron reflectometer operates at electron energies between 5 keV and 100 keV at glancing angles of less than 1°, taking advantage of high electron reflectivity at these conditions. This innovation has significant implications for fields like electron physics, nanometrology, and nanotechnology, enabling more precise measurement and characterization of nanoscale structures and surfaces.
Source: https://www.nist.gov/patents/electron-reflectometer-and-process-performing-shape-metrology
Keywords: Electron, Metrology, Nanoscale, Dimensions, Reflectometry
