NIST Develops Advanced Calibration Kits for Semiconductor Metrology
The National Institute of Standards and Technology (NIST) is addressing challenges in measuring Scattering (S-) parameters for integrated circuits by developing and distributing high-quality on-wafer S-parameter calibration kits. These kits, containing optimized integrated circuits on standard reference materials (SRMs), will provide validated research-grade calibration solutions to semiconductor manufacturers.
The project aims to:
1. Provide industry with NIST-validated on-wafer S-parameter calibration kits
2. Integrate NIST models into commercial calibration software
3. Address the lack of commercial kits validated beyond 100GHz
NIST will collaborate with manufacturers to fabricate calibration kits using best practices identified by NIST and an IEEE working group. By ensuring traceable calibration standards, the project will benefit the U.S. semiconductor industry by providing common, accurate on-wafer measurement techniques.
Standard Reference Materials (SRMs) play a crucial role in this project, providing measurement consistency and facilitating accurate test and calibration processes. The successful distribution of these calibrated kits will significantly improve the precision and repeatability of semiconductor measurements, ultimately contributing to higher-quality products and faster technological advancements in the semiconductor industry.
Source: https://www.nist.gov/programs-projects/calnet
Keywords: NIST, Scattering parameters, Semiconductor metrology
