The National Institute of Standards and Technology (NIST) has launched the CHIPS Metrology Program to address critical measurement challenges in the domestic semiconductor industry. The program aims to improve the accuracy, precision, and relevance of measurements for semiconductor manufacturing through collaboration with industry, academia, and government agencies.
The program focuses on seven grand challenges identified in NIST’s September 2022 report, including metrology for materials purity, properties, and provenance, and advanced metrology for future microelectronics manufacturing. The CHIPS Metrology Community facilitates data and knowledge sharing across these initiatives, while the Metrology Exchange to Innovate in Semiconductors (METIS) provides stakeholders access to research results and catalyzes innovative breakthroughs.
The program’s roadmap is aligned with the CHIPS Act, external stakeholder needs, and NIST capabilities, with projects launched to address these measurement challenges in semiconductor manufacturing.
Source: https://www.nist.gov/chips/research-development-programs/metrology-program
Keywords: Metrology, Semiconductor manufacturing, Measurement science
