Device Fabrication Group | NIST

The Device Fabrication Group at NIST is using advanced micro- and nanofabrication techniques to create innovative sensors and electronics for quantum technologies. They utilize the Boulder Microfabrication Facility to produce various standard circuits, including Transition-Edge Sensors (TESs), Microwave Kinetic Inductance Detectors (MKIDs), and Superconducting Quantum Interference Devices (SQUIDs).

The group is focused on developing new processes and techniques to integrate multiple types of circuits on a single substrate. This integration allows for the combination of different sensor types, such as NIS tunnel junction refrigerators with TES sensors, and microwave SQUID multiplexers with TES sensors. These advancements enable more complex and capable quantum sensors and readout systems.

Source: https://www.nist.gov/pml/quantum-sensors/device-fabrication

Keywords: Superconducting, Quantum, Sensors, Microfabrication, Cryogenic

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