NIST has developed a new small-scale measurement technology called the Photonic Calorimeter, which is now available for licensing. This chip-based device is designed to measure radiation dose with high precision, especially in thin layers near material surfaces. It has potential applications in areas like semiconductor manufacturing, medical equipment sterilization, and thin-film processing. The technology is inexpensive to manufacture and operate, making it a promising tool for various industries.
The invention was developed by NIST researchers starting in 2017 as part of the “NIST on a Chip” program, which aims to bring advanced measurement technologies to practical use in business, medicine, defense, and academia. The device works by detecting changes in its resonance characteristics when exposed to radiation. NIST is now seeking partners to commercialize the technology, and interested parties can contact NIST’s Technology Partnerships Office for more information.
Keywords: photonic calorimeter, dosimeter, chip-based technology
