High-Q Micromechanical Torsion Resonator Based On Suspending A Test Mass From A Nanoribbon | NIST

The article discusses a new invention from NIST – a high-precision micromechanical torsion resonator device. The device consists of a rigid mass suspended by two or more nanoribbons, which are placed under tensile stress. This unique design allows for the measurement of local acceleration with high sensitivity and precision.

The rigid mass can be made of silicon, while the nanoribbons are typically made of silicon nitride. The mass has a polygonal shape with at least four sides, where one side is longer than the others. This invention has potential applications in high-precision measurements and nanoscale material testing.

The key technical points are:
1. A rigid mass suspended by nanoribbons under tension
2. High sensitivity and precision in measuring local acceleration
3. Use of silicon and silicon nitride materials
4. Polygonal mass shape with one longer side
5. Potential applications in quantum standards and nanotechnology research

Source: https://www.nist.gov/patents/high-q-micromechanical-torsion-resonator-based-suspending-test-mass-nanoribbon

Keywords: Nanoribbons, Torsion, Silicon, Precision, Nanoscale

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