NIST is advancing measurement science at the atomic and nanometer scale, focusing on precision optical metrology and quantum systems. Key areas of research include:
1. Quantum dots and wires, nanomechanical structures, and optical microcavities
2. Metallic nanoparticles and nanoscale features induced by highly charged ions
3. Advanced lithography, plasma etching, nanolasers, detectors, and sensors
The research combines theory and experiment to develop new precision measurement tools and further understanding of these systems. Ultrahigh precision measurements of optical response are critically needed for next generation optical lithography in the semiconductor industry.
Implementation timeframes:
– Ongoing research and development
– Applications in semiconductor industry for sub-100 nm optical nanolithography
Source: https://www.nist.gov/pml/quantum-measurement/objectives/nanoscale-and-quantum-metrology
Keywords: nanoscale, precision, metrology, quantum, optical
