Title: NIST Awards Gold Medal to Kline, Sunday, and Windover for Semiconductor Metrology Breakthrough
Summary:
The National Institute of Standards and Technology (NIST) has awarded its prestigious Gold Medal to R. Joseph Kline, Daniel Sunday, and Donald Windover for their groundbreaking work in semiconductor metrology. The team developed a new method called Critical Dimension Small Angle X-Ray Scattering (CD-SAXS), which enables non-destructive, three-dimensional measurement of nanostructures in semiconductor devices directly on production wafers.
CD-SAXS addresses a critical challenge in the semiconductor industry by providing accurate measurements at the necessary length scales to advance next-generation device manufacturing. The method has been actively adopted across the industry through close collaboration with industry partners, demonstrating its practicality and impact on semiconductor technology development.
Source: https://www.nist.gov/nist-awards/2018-gold-medal-award-r-joseph-kline-daniel-sunday-donald-windover
Keywords: Nanostructures, Dimensional Metrology, CD-SAXS, Semiconductor Devices, Next-generation Manufacturing
