The Boulder Microfabrication Facility (BMF) is a state-of-the-art clean room at NIST-Boulder, measuring 1,700 square meters (18,000 square feet) and operating at ISO class 5 (class 100) standards. This facility provides advanced micro- and nano-fabrication capabilities to support research and development of microelectronic and microelectromechanical systems. Approximately 60% of the research conducted at NIST-Boulder relies on the BMF for critical fabrication needs.
Source: https://www.nist.gov/programs-projects/boulder-microfabrication-facility
Keywords: Nano, Fabrication, Microelectronic, Metrology
