Index of Semiconductor Process Gases – Helium | NIST

This article presents a comprehensive table of thermophysical properties for helium-4 gas at various temperatures, including reduced heat capacity, vapor pressure, volumetric expansion, and temperature derivatives. The data spans a wide temperature range from 100 K to 10,000 K, providing valuable information for researchers and engineers working with helium-based systems in cryogenics, semiconductor manufacturing, and other applications.

The table is organized by temperature in ascending order, with each row containing the relevant property values. Uncertainty estimates are provided where available, though some data points lack uncertainty information. The notation system uses “#” for estimated values, “*” and “+” to differentiate between data sets within a single column, and no uncertainty data is specified for some entries.

This extensive dataset will be a valuable resource for those developing models and simulations involving helium-4 gas, particularly in the context of semiconductor manufacturing processes that rely on precise control of thermophysical properties.

Source: https://www.nist.gov/pml/sensor-science/fluid-metrology/database-thermophysical-properties-gases-used-semiconductor-9

Keywords: Quantum Sensors, Quantum Metrology, Atomic Clocks

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