The NIST/Industrial MMIC Measurement Consortium, consisting of major US companies like TRW, Cascade Microtech, and Hewlett Packard, has developed advanced calibration methods for on-wafer measurements in the MMIC industry. Key developments include:
1. Multiline TRL calibration method with reference impedance correction, implemented in the easy-to-use MultiCal® software
2. Modified LRM Calibration Method accounting for imperfect MMIC standards
3. Probe-Tip Capacitance Compensation Method for high accuracy without on-wafer standards
4. Methods for measuring on lossy substrates like polymers and silicon
5. Multiport and orthogonal calibration systems
These calibration methods and software tools enable accurate on-wafer measurements in the MMIC industry, supporting high-speed microelectronics development.
Source: https://www.nist.gov/ctl/nistindustrial-mmic-consortium
Keywords: Microstrip, NIST, MMIC
