Researchers at NIST have developed a method to link quartz crystal microbalance (QCM) measurements to the SI unit of mass, providing traceability to the redefined International System of Units (SI). This is a significant advancement for industries that rely on QCMs for precise measurements of thin film thickness.
QCMs are crucial for controlling thin film formation in industries like microchip fabrication. They provide a sensitive measure of mass added to the device by vibrating at a resonant frequency affected by the mass of deposited materials. This new method implements SI traceability for the first time in a device used so widely by industry and academia, addressing long-standing questions about absolute mass accuracy of QCM measurements.
The research, published in Metrologia, provides a key step forward in achieving traceability for QCM measurements, enhancing their utility across multiple industries and academic fields.
Source: https://www.nist.gov/news-events/news/2020/02/universe-balance
Keywords: Quartz Crystal Microbalances, SI traceability, Thin film thickness
