NIST Develops Revolutionary X-ray Microcalorimeter for Semiconductor Industry
The National Institute of Standards and Technology (NIST) has created a groundbreaking X-ray microcalorimeter that promises to revolutionize materials analysis, particularly in the semiconductor industry. This new device, which fits onto a standard scanning electron microscope (SEM), operates at near absolute zero temperatures and provides X-ray energy resolution 10 times better than conventional systems.
The microcalorimeter works by converting X-ray energy into heat, with a superconducting thermometer measuring the resulting temperature change. This allows for much higher resolution than current semiconductor EDS detectors, while maintaining the ease of use of wavelength dispersive spectrometers (WDS).
The improved resolution is critical for semiconductor manufacturing, as it allows definitive identification of tungsten silicide – a key material in integrated circuit fabrication. NIST is seeking industrial partners to help commercialize the technology, with patents pending on key components.
The new system also incorporates a compact liquid-helium cryostat and a sensitive SQUID preamplifier developed by NIST, enabling practical implementation in existing SEM systems. This breakthrough has the potential to significantly enhance microanalysis capabilities, including sensitivity, spatial resolution, and light element identification.
Keywords: Microcalorimeter, X-ray energy resolution, Superconductor, Transition-edge-sensor (TES), Electrothermal feedback (ETF)
