The article discusses the use of a Dual Beam Focused Ion Beam / Scanning Electron Microscope (FIB/SEM) at NIST in Boulder, Colorado. This advanced microscopy tool is used by over 25 unique users from five different divisions within NIST. The FIB/SEM is crucial for three ongoing Innovations in Measurement Science awards:
1. Extreme Atom Probe Tomography for Subnanometer-Resolution 3-D Chemical Mapping
2. DC to 1 THz Large-Amplitude Optoelectronic Multitone Electrical-Signal Synthesizer
3. Establishing the science and technology of networks for superconducting quantum computers
Additionally, two measurement services rely on the FIB/SEM: Standard Reference Instrument SRI1012 and Calibration Service 15510. These services involve creating nanostructure arrays with calibrated dimensions and calibrating nanostructure diameter, spacing, and height, respectively.
The FIB/SEM is also used by participants in CRADA agreements with academia, such as the University of Colorado, and industry partners like Cameca and Aledia.
Keywords: Superconducting, Nanoscale, Metrology, Calibration, Quantum
