Method And Process For Tantala Integrated Nonlinear Photonics | NIST

Researchers at NIST have developed a new method for creating integrated nonlinear photonics using a material called tantala (tantalum pentoxide). This innovation allows for the fabrication of high-performance devices, such as microresonator frequency combs, at lower cost and higher yield compared to current materials like silicon nitride. The process involves depositing tantala on oxidized silicon wafers and using standard semiconductor techniques to build nonlinear photonics devices.

Tantala offers several advantages, including low optical losses, a wide transparency window, low tensile stress for better fabrication yields, and a lower thermal processing temperature, which makes it more compatible with other photonics materials. While tantala shows strong potential, challenges such as material stability and thermal crystallization may need to be addressed. This development could significantly impact the field of nonlinear photonics, offering a more efficient and cost-effective platform for applications in quantum information, sensing, and precision metrology.

Source: https://www.nist.gov/patents/method-and-process-tantala-integrated-nonlinear-photonics

Keywords: tantala, nonlinear photonics, microresonator frequency combs

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