NIST has developed a new microfabricated optical probe designed to improve the testing of photonic devices. Traditional optical probes are large, difficult to control, and sensitive to vibrations, making precise in-line testing challenging. The new probe is small, stiff, and resistant to mechanical vibrations, allowing for more accurate and reliable testing. It can be mass-produced at the wafer scale and works with existing scanning probe testing equipment.
The probe features a looped waveguide structure that allows for precise control of light coupling. It is attached to a micromechanical cantilever and used in commercial scanning probe microscopes. This innovation could significantly improve the efficiency and accuracy of optical testing in integrated photonics, supporting the development of more advanced photonic circuits and devices.
Source: https://www.nist.gov/patents/microfabricated-optical-probe
Keywords: microfabricated optical probe, evanescent coupling, scanning probe microscope
